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STRUCTURED WAFERS
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Wafers
Basic Material: please refer to Glass- and Quartzwafers.
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Technology
Ultra Sonic Drilling.
USHD (Ultra Sonic High Speed Drilling).
Powder Blasting.
Etching.
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Holes
Round and rectangular through holes.
Very small location tolerances.
High centricity.
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Channels
Minimum channel width: 50 microns.
Channel depth and distance not limited.
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Cavities
Variable surface quality of cavity bottom surface
(including optical quality).
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Contact
Carsten Wesselkamp
Email: c.wesselkamp@planoptik.com
Tel: +49 2664 5068 25
Fax: +49 2664 5068 91
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