Plan Optik AG
 
 
 
 
STRUCTURED WAFERS
Wafers

Basic Material: please refer to Glass- and Quartzwafers.
Technology

Ultra Sonic Drilling.
USHD (Ultra Sonic High Speed Drilling).
Powder Blasting.
Etching.

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Holes

Round and rectangular through holes.
Very small location tolerances.
High centricity.
Channels

Minimum channel width: 50 microns.
Channel depth and distance not limited.
Cavities

Variable surface quality of cavity bottom surface
(including optical quality).
Contact

Carsten Wesselkamp
Email: c.wesselkamp@planoptik.com
Tel: +49 2664 5068 25
Fax: +49 2664 5068 91
 
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