Plan Optik AG
 
 
 
 
GLASS- AND QUARTZWAFERS
Materials

Borosilicate Glass (e.g. Borofloat33® or Pyrex7740®).
Quartz Glass (fused quartz and fused silica).
Alkali free Glass.
Optical Glass.
Dimensions

Diameter: 50.8 to 300 mm.
Thickness: 100 microns to 10 mm.
Design

Optimized edge profile with flat(s) or notch.
Double side or single side polished or ground (Standard: double side polished).
Clean room packed (class 1000 according to Fed 209).
Specifications

Minimal ttv (total thickness variation): 2 microns.
Minimal bow / warp: 10 microns.
Minimal roughness of polished surfaces: 0.5 nm (Ra).
MDF Polishing

Best available surface quality (no micro defects).
No measurable micro damaging (sub surface damaging).
Unbeatable bonding results (without defects and fast).
"Ready to etch" (stable, defect free etching behaviour).
Options

Intermediate sizes. Square Wafers.
Asymmetric edge profiles.
Consecutive laser marking.
Standard Wafers

Structured Wafers


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Contact

Carsten Wesselkamp
Email: c.wesselkamp@planoptik.com
Tel: +49 2664 5068 25
Fax: +49 2664 5068 91
 
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