Customized quartz wafers

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Customized quartz wafers



Besides Plan Optik's quartz wafers, which are available off the shelf, Plan Optik manufactures quartz wafers (SiO2) in a large scale production using high purity quartz glass. In contrast to crystalline quartz, the substance used here is amorphous quartz glass. These wafers are characterized by low thickness tolerances, high quality surfaces and low ttv values.

Plan Optik's quartz wafers are defined as an alkaline-free and ultra-pure substrate, virtually unadulterated by foreign matter. They are therefore used in semiconductor technology and as a coating substrate. Typical industrial fields of application include the construction of RF modules, PLC splitters as well as micro fluidics and medicine.

Plan Optik's quartz wafers are resistant to high temperatures and virtually non-fluorescent.

Materials



A) Plan Optik standard and recommended type

The following material is suitable for almost all semiconductor, laboratory, medical and optical applications. It provides a very high temperature resistance and low fluorescence.

For deep UV optics please refer to B).


Material Amorphous quartz glass (SiO2)
Main features alkaline free
low fluorescence
low OH content
high temperature resistance
Thermal Data  
Softening temperature
Annealing temperature
Strain temperature
Max. working temperature (continuous)
Max. working temperature (short term)
1710 °C
1220 °C
1125 °C
1160 °C
1300 °C
Heat Conductivity
W/(m K))
20 °C: 1.38
100 °C: 1.47
200 °C: 1.55
300 °C: 1.67
400 °C: 1.84
950 °C: 2.68
Coefficient of thermal expansion (cte)
(10-6 K-1)
0..100 °C: 0.51
0..200 °C: 0.58
0..300 °C: 0.59
0..600 °C: 0.54
0..900 °C: 0.48
-50..0 °C: 0.27
Specific heat
(J/(kg K))
0..100 °C: 772
0..500 °C: 964
0..900 °C: 1052
Mechanical data  
Density (kg/m3)
Mohs hardness
Knoop (N/mm2)
Modulus of elasticity (20 °C; MPa)
Poisson's ratio

2203
5.5..6.5
5800..6100
72500
0.17
Electrical data  
Electrical resistivity
(Ω cm)
20 °C: 1.0 x 1018
400 °C: 1.0 x 1010
800 °C: 6.3 x 106
1200 °C: 1.3 x 105
Dielectric strength
(KV/mm; sample thickness ≥ 5 mm)
20 °C: 25..40
500 °C: 4..5
Dielectric loss angle (tg δ) 1 KHz: 5.0 x 10-4
1 MHz: 1.0 x 10-4
3 x 1010 Hz: 4.0 x 10-4
Dielectric constant (ε) 20 °C; 0..106 Hz: 3.70
23 °C; 9x108 Hz: 3.77
23 °C; 3x1010 Hz: 3.81
Chemical Data
Trace elements (ppm)

Al Ca Cr Cu Fe K Li Mg Mn Na Ti Zr Oh
15 0.5 < 0.05 < 0.05 0.1 0.4 0.6 0.05 < 0.05 0.3 1.1 0.7 < 30


Optical Data  
Transmission
(typical; 1 mm thick sample; including Fresnel reflection losses)
200 nm: 75%
250 nm: 87%
300..3500 nm: 92%

B) optional material types

Plan Optik produces wafers from all available, amorphous quartz glass types. This includes laser grades and deep UV grade material.

Ask us! We will find the right material for your application.


Dimension

Plan Optik produces quartz wafers in the following dimensions:

diameter up to 200 mm
rectangular up to 200 mm length
thickness: between 200 microns (0.2 mm) and 6 mm


Surface quality

Plan Optik's quartz wafers are available with either double side polished or single / double side ground surfaces.


Laser marking


Plan Optik's quartz lass wafers are having an optional alphanumeric laser marking fitting your request. QR codes are available as well.


Patterning, Structuring

Plan Optik offers the full range of patterning processes such as sand blasting, drilling, milling, wet etching, etc. on it's quartz wafers as well. For further information please browse to "Packaging Wafers".


Coating

Plan Optik's quartz wafers can optionally be supplied with a wide range of coatings such as anti reflection (AR), conductive (ITO), etc.