Packaging wafers

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Materials



Plan Optik manufactures packaging wafers of glass, quartz, silicon and combinations of these materials.*


Borosilicate glass


Type Borofloat 33 ®
Thickness range 100 - 3000 µm
Expansion coefficient (CTE) 3.25 x 10-6 K-1 (adjusted to Si)
Refraction index (nD) 1.4713
Electrical properties Dielectric constant (25°C; 1 MHz): 4.6
Loss factor (25°C; 1 MHz): 37x10-4
Main characteristics Expansion coefficient adjusted to Si,
anodically bondable
Type D263 ®
Thickness range 100 - 1000 µm
Expansion coefficient (CTE) 7.2 x 10-6 K-1
Refraction index (nD) 1.523
Electrical properties Dielectric constant (1 MHz): 6.7
Loss factor (1 MHz): 61x10-4
Main characteristics High optical transmission

Alkaline-free glass


Type Eagle XG ®
Thickness range 100 - 1000 µm
Expansion coefficient (CTE) 3.17 x 10-6 K-1 (adjusted to Si)
Refraction index (nD) 1.5099
Electrical properties Dielectric constant (20°C; 1 KHz): 5.27
Loss factor (20°C; 1 KHz): 0.3 %
Main characteristics Expansion coefficient adjusted to Si,
Low fluorescence

Quartz


Type fused quartz
Thickness range 200 - 3000 µm
Expansion coefficient (CTE) 0.5 x 10-6 K-1
Refraction index (nD) 1.4586
Electrical properties Dielectric constant (20°C; 1 MHz): 3.75
Loss factor (20°C; 1 MHz): 4x10-4
Main characteristics High temperature stability,
UV-permeable
Type Fused silica
Thickness range 200 - 3000 µm
Expansion coefficient (CTE) 0.5 x 10-6 K-1
Refraction index (nD) 1.4584
Electrical properties Dielectric constant (20°C; 1 MHz): 3.8
Loss factor (25°C; 1 MHz): 4x10-4
Main characteristics High temperature stability,
UV-permeable

Silicon


For the manufacture of its packaging wafers Plan Optik uses all available standard silicon wafers from all reputable manufacturers. Their specifications are selected in accordance with customer requirements.


Additional materials


Upon customer request Plan Optik can manufacture packaging wafers from a selection of more than 300 types of glass or combinations thereof (e.g. optical glasses, soda-lime glass).



* All technical data in accordance with the details supplied by the manufacturers of the raw materials - without liability - subject to modification.