Micro lenses

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Plan Optik manufactures micro lenses on the basis of wafers up to a maximum wafer size of 200 mm. These can be used by means of a cutting process to generate all other smaller dimensions (single lenses or lens arrays).

Flat(s), notches and diameter can be adjusted to suit customer requirements.

Diameter wafer Up to 200 mm
Thickness wafer / lens 0.2 mm - 3.0 mm
Height single lens Up to 0.6 mm
Focal length single lens 0.3 mm - 60 mm
Diameter single lens from 50 µm
Numerical aperture 0.02 to 0.32
Aberration from λ/2
Edge geometry wafer incl. flat(s) + notch(es) In accordance with SEMI for monocrystalline Si wafers
or in accordance with customer requirements (e.g. without flat / notch)

The use of contact-free optical surface measurement techniques ensures the reliable adherence to the predetermined narrow tolerances.