Fluidic components

Home Pfeil 製品 Pfeil Fluidic components Pfeil Dimensions Pfeil

Dimensions



Plan Optik produces fluidic components on the basis of wafers with diameters from 2" - 200 mm and thicknesses from 150 µm. The precise specification of each wafer is determined in agreement with the customer, depending on the intended application.


Diameter 2" - 200 mm
Thickness range 150 - 3000 µm
Total thickness variation (ttv) from 2 µm
Edge geometry incl. flat(s) + notch in accordance with SEMI for monocrystalline Si wafers

Plan Optik produces fluidic components on the basis of specifications which are determined in close cooperation with the customer in accordance with the intended application.