Customized borosilicate wafers

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Materials



Plan Optik produces customized wafers using all usual types of glass.*


Borosilicate glass


Type Borofloat 33 ®
Thickness range 100 - 3000 µm
Expansion coefficient (CTE) 3.25 x 10-6 K-1 (adjusted to Si)
Refraction index (nD) 1.4713
Electrical properties Dielectric constant (25°C; 1 MHz): 4.6
Loss factor (25°C; 1 MHz): 37x10-4
Main characteristics Expansion coefficient adjusted to Si,
anodically bondable
Type D263 ®
Thickness range 100 - 1000 µm
Expansion coefficient (CTE) 7.2 x 10-6 K-1
Refraction index (nD) 1.523
Electrical properties Dielectric constant (1 MHz): 6.7
Loss factor (1 MHz): 61x10-4
Main characteristics High optical transmission

Alkaline-free glass



Type Eagle XG ®
Thickness range 100 - 1000 µm
Expansion coefficient (CTE) 3.17 x 10-6 K-1 (adjusted to Si)
Refraction index (nD) 1.5099
Electrical properties Dielectric constant (20°C; 1 KHz): 5.27
Loss factor (20°C; 1 KHz): 0.3 %
Main characteristics Expansion coefficient adjusted to Si,
Low fluorescence


* All technical data according to information supplied by the manufacturer of the raw materials - without liability - subject to alteration.