Fluidic components

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Materials



Plan Optik produces fluidic components using anodically bondable borosilicate glass, alkaline-free glass, quartz glass and glass-Si combinations.*


Borosilicate glass


Type Borofloat 33 ®
Thickness range 100 - 3000 µm
Expansion coefficient (CTE) 3.25 x 10-6 K-1 (adjusted to Si)
Refraction index (nD) 1.4713
Electrical properties Dielectric constant (25°C; 1 MHz): 4.6
Loss factor (25°C; 1 MHz): 37x10-4
Main characteristics Expansion coefficient adjusted to Si,
anodically bondable

Fused quartz


Thickness range 300 - 2000 µm
Expansion coefficient (CTE) 0.5 x 10-6 K-1
Refraction index (nD) 1.4586
Electrical properties Dielectric constant (20°C; 1 MHz): 3.75
Loss factor (20°C; 1 MHz): 4x10-4
Main characteristics High temperature stability through low ratio of hydroxide groups (OH)
UV-permeable from approx. 270 nm

Fused silica


Thickness range 300 - 2000 µm
Expansion coefficient (CTE) 0.5 x 10-6 K-1
Refraction index (nD) 1.4584
Electrical properties Dielectric constant (20°C; 1 MHz): 3.8
Loss factor (25°C; 1 MHz): 4x10-4
Main characteristics UV-permeable from approx. 200 nm

Silicon


For the manufacture of fluidic components Plan Optik uses all monocrystalline standard silicon wafers available on the market; the specifications are selected to comply with customer requirements.

Typically, p-Bor doped <100> wafers are used for fluidic components


Additional materials


Plan Optik produces fluidic components from all glass types available from well-known manufacturers in accordance with customer requirements.



* All technical data in accordance with the details supplied by the manufacturers of the raw materials - without liability - subject to modification.