Through Glass Vias (TGV)

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Materials



Plan Optik manufactures TGV using a combination of borosilicate glass and highly-doped silicon.*


Borosilicate glass


Type Borofloat 33 ®
Expansion coefficient (CTE) 3.25 x 10-6 K-1 (adjusted to Si)
Refraction index (nD) 1.4713
Electrical properties Dielectric constant (25°C; 1 MHz): 4.6
Loss factor (25°C; 1 MHz): 37x10-4
Main characteristics Expansion coefficient adjusted to Si,
anodically bondable

Silicon


Type Highly doped
Doping P+ (Bor)
Crystal orientation <100>
Resistance 0.01 - 0.02 Ωcm

Additional materials


Plan Optik produces TGV according to customer requirements using all crystal orientations and doping available on the market.



* All technical data in accordance with the details supplied by the manufacturers of the raw materials - without liability - subject to modification.