Standard borosilicate wafers

Home Pfeil Products Pfeil Substrate wafers Pfeil Borosilicate wafers Pfeil Standard wafers Pfeil

Standard borosilicate wafers


for MEMS and Opto-Electronics



Plan Optik standard wafers are available at short notice ex warehouse (subject to prior sales). Standard wafers are available either with the established standard polish finish - or with the enhanced MDF polish finish with minimized micro damaging at wet etching and acid cleaning processes.


Material Borofloat® 33
Expansion coefficient (CTE) 3.25 x 10-6 K-1 (adapted to Si)
Refraction index (nD) 1.4713
Electrical properties Dielectric constant (25°C; 1 MHz): 4.6
Loss factor (25°C; 1 MHz): 37x10-4
Log electr. volume resistance: (250°C): 8.0 Ωcm
(350°C): 6.5 Ωcm
Main characteristics Thermal expansion adapted to Si, anodic bonding possible
Chamfering Optimized chamfer profile for glass wafers (in accordance with SEMI)
Edge exclusion zone 6 mm
Packaging Clean room packaging
Packaging unit Min. 10 pieces
Minimum order size 1 packaging unit


Article number Diameter (mm) Thickness (μm) ttv (μm) Polishing grade SEMI flat/notch (mm)
V015.04-1002 100.0 ± 0.3 100 ± 10 < 10 Regular 32.5
V015.04-1003 100.0 ± 0.3 150 ± 10 < 10 Regular 32.5
V015.04-1004 100.0 ± 0.3 200 ± 10 < 10 Regular 32.5
V015.04-0005 100.0 ± 0.3 500 ± 10 < 10 MDF 32.5
V015.04-1005 100.0 ± 0.3 300 ± 10 < 10 Regular 32.5
V015.04-1006 100.0 ± 0.3 400 ± 10 < 10 Regular 32.5
V015.04-1007 100.0 ± 0.3 500 ± 10 < 10 Regular 32.5
V015.04-1008 100.0 ± 0.3 600 ± 10 < 10 Regular 32.5
V015.04-1009 100.0 ± 0.3 700 ± 10 < 10 Regular 32.5
V015.04-1011 100.0 ± 0.3 1000 ± 10 < 10 Regular 32.5
V015.06-1002 150.0 ± 0.3 100 ± 10 < 10 Regular 57.5
V015.06-1003 150.0 ± 0.3 150 ± 10 < 10 Regular 57.5
V015.06-1004 150.0 ± 0.3 200 ± 10 < 10 Regular 57.5
V015.06-1005 150.0 ± 0.3 300 ± 10 < 10 Regular 57.5
V015.06-1006 150.0 ± 0.3 400 ± 10 < 10 Regular 57.5
V015.06-1007 150.0 ± 0.3 500 ± 10 < 10 Regular 57.5
V015.06-0008 150.0 ± 0.3 500 ± 10 < 10 MDF 57.5
V015.06-1008 150.0 ± 0.3 600 ± 10 < 10 Regular 57.5
V015.06-1009 150.0 ± 0.3 700 ± 10 < 10 Regular 57.5
V015.06-1011 150.0 ± 0.3 1000 ± 10 < 10 Regular 57.5
V015.08-0004 200.0 ± 0.3 500 ± 10 < 10 MDF Notch
V015.08-1004 200.0 ± 0.3 200 ± 10 < 10 Regular Notch
V015.08-1005 200.0 ± 0.3 300 ± 10 < 10 Regular Notch
V015.08-1006 200.0 ± 0.3 400 ± 10 < 10 Regular Notch
V015.08-1007 200.0 ± 0.3 500 ± 10 < 10 Regular Notch
V015.08-1008 200.0 ± 0.3 600 ± 10 < 10 Regular Notch
V015.08-1009 200.0 ± 0.3 700 ± 10 < 10 Regular Notch
V015.08-1011 200.0 ± 0.3 1000 ± 10 < 10 Regular Notch
V015.12-0005 300.0 ± 0.2 775 ± 20 < 10 MDF Notch
V015.12-1006 300.0 ± 0.3 400 ± 10 < 10 Regular Notch
V015.12-1007 300.0 ± 0.3 500 ± 10 < 10 Regular Notch
V015.12-1009 300.0 ± 0.3 700 ± 10 < 10 Regular Notch
V015.12-1011 300.0 ± 0.3 1000 ± 10 < 10 Regular Notch


Standard polishing


For all standard applications such as, for example, anodic bonding with Si.
Roughness < 1.0 nm


MDF polishing


Specially developed for wet-chemical structuring (no sub surface damaging) and direct bonding.
Roughness < 0.5 nm



download product information (pdf 692 KB)