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27.10.2010
Plan Optik opens new 200 mm MEMS cap wafer line


Plan Optik AG has recently opened it's new 200 mm cap wafer fab in Germany.

The actual expansion of Plan Optik's capacity includes investments in latest grinding, CMP and anodic bonding equipment and not least automation of existing processes.

Plan Optik offers cap wafer solutions from glass and glass silicon compounds. This includes cap wafers for the packaging of optical MEMS such as CMOS image sensors, projection technology (DLP) and high power LED packaging.

Core processes used by Plan Optik are fully automatic grinding, polishing (CMP), (ultra sonic) drilling, sand blasting, wet etching and bonding glass and glass-silicon compound substrates. Materials used are borosilicate and alkaline free glass as well as silicon and silica (quartz).

Combining the big variety of processing techniques, Plan Optik offers cap wafers with optical (transparent) cavities, through holes for conductive connection as well as high accuracy blank glass substrates for best available performance. These wafers are clean room suitable and are already implemented in many high end sensor applications.

All wafers produced by Plan Optik are characterized by low ttv, thickness tolerance, low roughness and high surface quality. Plan Optik set the benchmark in respect to virtually perfect glass wafer surfaces by introducing it's proprietary development MDF polishing to the market. MDF (Micro Damaging Free) polished wafers are suitable for wet etching processes and avoid the well known issue sub surface damaging which can lead to defects. Sub surface damaging leads to small cavities and interconnections between the etched structures weakens the bonding interface and results in a low yield. The use of MDF polished wafers leads to reliable wet etching results and provides a high wafer processing yield.

Plan Optik, a public company located in Germany produces polished wafers for MEMS applications such as tire pressure monitoring systems and drug dispensing solutions since almost 20 years.

Plan Optik's ISO TS 16949, ISO 14001 and ISO 9001 certifications ensure the high quality all substrates are produced to.