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15.01.2010
Micro Fluidic Substrates


Plan Optik offers the following micro fluidic substrates:

  • blank glass and quartz wafers
  • glass and quartz wafers with holes, channels, trenches
  • glass wafers with cavities

Plan Optik uses all available processing methods for the structuring of wafers such as sand (powder) blasting, wet etching, ultra sonic drilling and a patented moulding process.

Bonding of structured substrates by direct, adhesive and anodic bonding is available up to a size of 200 mm.

All wafers produced by Plan Optik are characterized by low ttv, thickness tolerance, low roughness and high surface quality. Plan Optik set the benchmark regarding perfect glass wafer surfaces by introducing it's proprietary development MDF polishing to the market. MDF (Micro Damaging Free) polished wafers are suitable for wet etching processes and avoid the well known issue sub surface damaging which can lead to defects. Sub surface damaging leads to small cavities and interconnections between the etched structures, weakens the bonding interface and results in a low yield. The use of MDF polished wafers leads to reliable wet etching results and provides a high wafer processing yield. MDF polished wafers are available as blank wafers as well as including holes and cavities.

Such wafers are already implemented in a drug delivery system as well as many gen analysis products.

Plan Optik's subsidiary "Little Things Factory" in Ilmenau additionally offers complex OEM sub systems for micro reaction technology as well as micro fluidics.

The above micro fluidic substrates complete the wide spectrum of glass and fused silica wafer options produced by the Plan Optik group - a well-established German company that has gone public with great success in the end of 2005.

Plan Optik's ISO TS 16949, ISO 14001 and ISO 9001 certifications ensure the best available substrate quality in the world.